• DocumentCode
    1947165
  • Title

    Some Aspects of the Scanning Acoustic Microscope Contributions in the Evaluation of Device Reliability

  • Author

    Saird, A. ; Du Chaffaut, C.Amaudric ; Saurel, J.M. ; Attal, J.

  • Author_Institution
    Laboratoire d´´Automatique et de Microélectronique, Unliversité des Sciences et Techniques du Languedoc, F-34060 Montpellier Cedex, France
  • fYear
    1988
  • fDate
    13-16 Sept. 1988
  • Abstract
    The scanning acoustic microscope, a technique suited to non-destructive investigations of microelectronic devices is presented in this paper. Specific applications are carried out on structures typically encountered in most of semiconductor components.
  • Keywords
    Acoustic devices; Acoustic waves; Bonding; Circuits; Frequency; Lenses; Microscopy; Optical materials; Optical surface waves; Surface acoustic waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid State Device Research Conference, 1988. ESSDERC '88. 18th European
  • Conference_Location
    Montpellier, France
  • Print_ISBN
    2868830994
  • Type

    conf

  • Filename
    5437034
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1947165