• DocumentCode
    1947201
  • Title

    Assessment of electro-static discharge robustness based on the monitoring of lattice temperature of silicon

  • Author

    Yoo, Kwang D. ; Lim, Gwang H. ; Jin, Joo H. ; Choi, Kyu H.

  • Author_Institution
    Semicond. R&D, Samsung Electron., Kyunggi, South Korea
  • fYear
    1994
  • fDate
    22-25 Mar 1994
  • Firstpage
    208
  • Lastpage
    213
  • Abstract
    In this paper, we demonstrate that it is possible to develop an optimum ESD protection device by comparing the relative ESD robustness of each device, based on the monitoring of the peak temperature correlated with the peak power density. The methodology, supported by measurement data, could give an extra degree of freedom to IC designers confronted with the troublesome ESD phenomenon
  • Keywords
    MOS integrated circuits; electrostatic discharge; integrated circuit technology; integrated circuit testing; protection; silicon; temperature distribution; IC design; Si; electrostatic discharge robustness; lattice temperature; optimum ESD protection device; peak power density; peak temperature; Biological system modeling; Circuit simulation; Electrostatic discharge; Lattices; Monitoring; Protection; Robustness; Silicon; Temperature measurement; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronic Test Structures, 1994. ICMTS 1994. Proceedings of the 1994 International Conference on
  • Conference_Location
    San Diego, CA
  • Print_ISBN
    0-7803-1757-2
  • Type

    conf

  • DOI
    10.1109/ICMTS.1994.303474
  • Filename
    303474