DocumentCode

1947237

Title

Electrical testing for MEMS´s piezoresistive pressure sensor

Author

Wahab, Mohd Zahrin b Abd ; Sauli, Zaliman B. ; Ahmad, Ibrahim ; Suradi, Walid B.

Author_Institution

MIMOS Berhad

fYear

2003

fDate

2003

Firstpage

33

Lastpage

35

Keywords

Boron; Circuit testing; Fabrication; Foundries; MIMO; Micromechanical devices; Piezoresistance; Sensor phenomena and characterization; Silicon; Stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2003. AsiaSense 2003. Asian Conference on

Print_ISBN

0-7803-8101-7

Type

conf

DOI

10.1109/ASENSE.2003.1224989

Filename

1224989