A fast and low-volume pipettor with integrated sensors for high precision

Author

Szita, Nicolas ; Sutter, Ruben ; Dual, J. ; Buser, R.

Author_Institution

Inst. of Mech., Eidgenossische Tech. Hochschule, Zurich, Switzerland

fYear

2000

fDate

23-27 Jan 2000

Firstpage

409

Lastpage

413

Abstract

This paper describes the design and the measurement results of a new micropipetting device for the pipetting of biological liquids. The device has been designed for precise, accurate and fast pipetting in the micro- and submicroliter range. It contains a precision pipetting head with two integrated sensors realised in silicon bulk micromachining to ensure precision and accuracy and a coupled piezo disk-type actuator to fulfil the force requirements of fast pipetting. Measurements in open-loop mode showed pipetting of 0.5 to 2 μl with a CV between 1 and 7%. Closed-loop control of the actuator can eliminate the piezoactuator´s hysteresis and drift and further increase precision and accuracy

Keywords

biological techniques; microactuators; micromachining; microsensors; Si; biological liquid; closed-loop control; integrated sensor; micropipetting device; open-loop mode; piezo disk-type actuator; pipettor; silicon bulk micromachining; Actuators; Aluminum; Biomembranes; Capacitive sensors; Capacitors; Displacement measurement; Glass; Position measurement; Silicon; Volume measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on

Conference_Location

Miyazaki

ISSN

1084-6999

Print_ISBN

0-7803-5273-4

Type

conf

DOI

10.1109/MEMSYS.2000.838552

Filename

838552