Damping of micro electrostatic torsion mirror caused by air-film viscosity

Author

Uchida, Norio ; Uchimaru, Kiyotaka ; Yonezawa, Minoru ; Sekimura, Masayuki

Author_Institution

Res. & Dev. Center, Toshiba Corp., Kawasaki, Japan

fYear

2000

fDate

23-27 Jan 2000

Firstpage

449

Lastpage

454

Abstract

A method of analyzing the damping characteristics of electrostatically driven torsion mirror actuators which have deep grooves on their electrodes is described. The damping force is caused by viscous friction of the gas film between a moving mirror plate and the electrodes. The grooves decrease the damping force and enable the moving plate to be driven at high speed and low driving voltage. To calculate the damping force correctly, it is necessary to consider the viscous friction not only on the moving plate and electrodes, but also on the sidewalls of the grooves. For that purpose, the idea of hydraulic mean depth is introduced and is applied to the Reynolds equation. The calculated damping force shows good agreement with the measured damping force of the developed torsion mirror actuator for optical heads

Keywords

damping; electrostatic devices; friction; micro-optics; mirrors; viscosity; Reynolds equation; air-film viscosity; damping characteristics; damping force; deep grooves; driving voltage; gas film; hydraulic mean depth; micro electrostatic torsion mirror; moving mirror plate; optical heads; sidewalls; torsion mirror actuator; viscous friction; Damping; Electrodes; Electrostatic actuators; Electrostatic analysis; Equations; Force measurement; Friction; High speed optical techniques; Low voltage; Mirrors;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on

Conference_Location

Miyazaki

ISSN

1084-6999

Print_ISBN

0-7803-5273-4

Type

conf

DOI

10.1109/MEMSYS.2000.838559

Filename

838559