Smart phase-only micromirror array fabricated by standard CMOS process

Smart, phase-only modulation micromirror arrays have been implemented through a commercial CMOS service. The novel, 2-dimensional array of deflectable micromirrors with integrated CMOS switching circuits and piezoresistive deflection sensors on flexures is presented in this paper. The individual mirror pixels are capable of modulating light in the visible to near-infrared spectrum by piston-like movement of a trampoline-type suspended micromirror driven by thermal multi-morph actuators. A flip chip bonding technology is used to integrate the micromirror array with a microlens array to increase the optical fill factor of the hybrid system. Finite element analysis is used to model electro-thermo-mechanical behavior of the micromirror. A 2.5 mrad beam steering angle was successfully demonstrated