Title :
New test structures for on-chip absolute and accurate measurement of capacitances in a CMOS process
Author :
Khalkhal, A. ; Girard, P. ; Nouet, P.
Author_Institution :
Lab. d´´Inf. de Robotique et de Microelectron. de Montpellier, Univ. des Sci. et Tech. du Languedoc, Montpellier, France
Abstract :
A new on-chip capacitance measurement technique is presented. Since no reference devices are required, it allows the absolute determination of constant capacitances and matching errors are greatly reduced. The test structure can be easily scaled to any CMOS process and can be used with unstable or not totally characterized processes. Experimental results show an accuracy better than 5% and a resolution of about 1% for capacitances varying from 4 up to 135 fF
Keywords :
CMOS integrated circuits; capacitance measurement; integrated circuit testing; 4 to 135 fF; CMOS process; absolute determination; matching error reduction; on-chip capacitance measurement; test structures; CMOS process; Capacitance measurement; Circuit simulation; MOS capacitors; Measurement techniques; Robots; Silicon; Testing; Time measurement; Voltage;
Conference_Titel :
Microelectronic Test Structures, 1994. ICMTS 1994. Proceedings of the 1994 International Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-1757-2
DOI :
10.1109/ICMTS.1994.303489
