Title :
Detection of 0.3/spl mu/m Particles on Fully Processed Simox Wafers
Author :
Genis, A. ; Krull, W. ; Lalezari, R. ; Turner, J.
Author_Institution :
Ibis Technology Corp.
Keywords :
Histograms; Lakes; Materials testing; Optical materials; Particle scattering; Performance analysis; Polarization; Signal analysis; Surface emitting lasers; Surface waves;
Conference_Titel :
SOI Conference, 1992. IEEE International
Conference_Location :
Ponte Vedra Beach, FL
Print_ISBN :
0-7803-7439-8
DOI :
10.1109/SOI.1992.664793
