Pressure, flow and oxygen saturation sensors on one chip for use in catheters

Author

Goosen, J.F.L. ; French, P.J. ; Sarro, P.M.

Author_Institution

Inst. for Microelectron. & Submicron Technol., Delft Univ. of Technol., Netherlands

fYear

2000

fDate

23-27 Jan 2000

Firstpage

537

Lastpage

540

Abstract

This paper presents a combination sensor chip, which is to be fitted to a catheter for use in intervention therapy. The chip contains an absolute pressure sensor, a thermal flow sensor and a colour sensor to determine respectively: blood pressure, blood flow velocity and oxygen saturation in one location at the same time. The sensors where fabricated using epi-micromachining. Change in absorption at wavelengths 660 nm and 800 nm due to the oxygenation of the blood are measured using two stacked photodiodes that serve as a colour sensor

Keywords

biomedical electronics; biomedical equipment; biosensors; blood flow measurement; blood pressure measurement; colour; micromachining; microsensors; oxygen; pressure sensors; 660 nm; 800 nm; absolute pressure sensor; blood flow velocity; blood pressure; catheters; colour sensor; combination sensor chip; epi-micromachining; intervention therapy; oxygen saturation sensor; stacked photodiodes; thermal flow sensor; Biomembranes; Blood; Catheters; Fluid flow measurement; Medical treatment; Oxygen; Temperature measurement; Temperature sensors; Thermal sensors; Velocity measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on

Conference_Location

Miyazaki

ISSN

1084-6999

Print_ISBN

0-7803-5273-4

Type

conf

DOI

10.1109/MEMSYS.2000.838574

Filename

838574