Title :
Pressure, flow and oxygen saturation sensors on one chip for use in catheters
Author :
Goosen, J.F.L. ; French, P.J. ; Sarro, P.M.
Author_Institution :
Inst. for Microelectron. & Submicron Technol., Delft Univ. of Technol., Netherlands
Abstract :
This paper presents a combination sensor chip, which is to be fitted to a catheter for use in intervention therapy. The chip contains an absolute pressure sensor, a thermal flow sensor and a colour sensor to determine respectively: blood pressure, blood flow velocity and oxygen saturation in one location at the same time. The sensors where fabricated using epi-micromachining. Change in absorption at wavelengths 660 nm and 800 nm due to the oxygenation of the blood are measured using two stacked photodiodes that serve as a colour sensor
Keywords :
biomedical electronics; biomedical equipment; biosensors; blood flow measurement; blood pressure measurement; colour; micromachining; microsensors; oxygen; pressure sensors; 660 nm; 800 nm; absolute pressure sensor; blood flow velocity; blood pressure; catheters; colour sensor; combination sensor chip; epi-micromachining; intervention therapy; oxygen saturation sensor; stacked photodiodes; thermal flow sensor; Biomembranes; Blood; Catheters; Fluid flow measurement; Medical treatment; Oxygen; Temperature measurement; Temperature sensors; Thermal sensors; Velocity measurement;
Conference_Titel :
Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on
Conference_Location :
Miyazaki
Print_ISBN :
0-7803-5273-4
DOI :
10.1109/MEMSYS.2000.838574
