Single-step assembly of complex 3-D microstructures

Author

Hui, Elliot E. ; Howe, Roger T. ; Rodgers, M. Steven

Author_Institution

Berkeley Sensor & Actuator Centre, California Univ., Berkeley, CA, USA

fYear

2000

fDate

23-27 Jan 2000

Firstpage

602

Lastpage

607

Abstract

This paper describes three-dimensional microstructures fabricated in a planar process and assembled in a single step. Multiple plates are constrained by hinges in such a way as to reduce the assembly process to a single degree-of-freedom of motion. Serial microassembly of these structures is simpler; moreover, self-assembly using hydrodynamic forces during release is much more feasible than with earlier, multiple degree-of-freedom hinged structures. A 250-μm corner cube reflector, a 6-sided closed box, and a 3-D model of the Berkeley Campanile clock tower have been demonstrated in the 4-level polysilicon SUMMiT MEMS foundry

Keywords

microactuators; microassembling; micromachining; self-assembly; 250 micron; 4-level polysilicon MEMS; 6-sided closed box; SUMMiT process; clock tower model; complex 3D microstructures; corner cube reflector; hinge constrained plates; multiple plates; parallel self-assembly; planar process; pop-up structure; serial microassembly; single degree-of-freedom of motion; single-step assembly; surface micromachining; Assembly; Clocks; Fasteners; Foundries; Hydrodynamics; Microassembly; Micromechanical devices; Microstructure; Poles and towers; Self-assembly;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on

Conference_Location

Miyazaki

ISSN

1084-6999

Print_ISBN

0-7803-5273-4

Type

conf

DOI

10.1109/MEMSYS.2000.838586

Filename

838586