DocumentCode
1948090
Title
Proceedings of 1994 IEEE International Conference on Microelectronic Test Structures
fYear
1994
fDate
22-25 March 1994
Abstract
The following topics were dealt with: parameter extraction; device characterization; dimensional measurements; reliability; process characterization; yield
Keywords
integrated circuit technology; integrated circuit testing; reliability; semiconductor device testing; semiconductor technology; spatial variables measurement; device characterization; dimensional measurements; microelectronic test structure; parameter extraction; process characterization; reliability; yield;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 1994. ICMTS 1994. Proceedings of the 1994 International Conference on
Conference_Location
San Diego, CA, USA
Print_ISBN
0-7803-1757-2
Type
conf
DOI
10.1109/ICMTS.1994.303514
Filename
303514
Link To Document