Adaptive switching control method for active vibration isolation

Author

Zhou, S. ; Li, Y.T. ; Meng, G. ; Ding, H.

Author_Institution

State Key Lab. of Vibration Shock & Noise, Shanghai Jiao Tong Univ.

fYear

2006

fDate

27-29 March 2006

Firstpage

462

Lastpage

467

Abstract

There exists serious vibration problem in microelectronic manufacturing field. The complex dynamics characteristic limits the application of active vibration isolation (AVI) technology. This paper presents the modified multiple model switching tuning (MMST) control scheme basing on the filtered linear quadratic Gaussian (LQG) controller, realizes the tracking and intensive suppression of dominant vibration frequency and broadband attenuation of disturbance/noise. The superior control performance and anti-noise ability of presented method under complex vibration environment is demonstrated by simulations

Keywords

adaptive control; linear quadratic Gaussian control; time-varying systems; vibration control; active vibration isolation; adaptive switching control method; broadband attenuation; filtered linear quadratic Gaussian controller; microelectronic manufacturing field; modified multiple model switching tuning control; Adaptive control; Attenuation; Frequency; Isolation technology; Manufacturing; Microelectronics; Nonlinear filters; Programmable control; Tuning; Vibration control;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Motion Control, 2006. 9th IEEE International Workshop on

Conference_Location

Istanbul

Print_ISBN

0-7803-9511-1

Type

conf

DOI

10.1109/AMC.2006.1631703

Filename

1631703