DocumentCode

1948218

Title

CMOS Integrated Chemical Microsensors and the Electronic Nose

Author

Baltes, Henry ; Brand, Oliver

Author_Institution

ETH, Zurich, Switzerland

Volume

1

fYear

1999

fDate

13-15 Sept. 1999

Firstpage

29

Lastpage

39

Keywords

CMOS technology; Chemical industry; Chemical sensors; Chemical technology; Electronic noses; Etching; Infrared sensors; Microsensors; Sensor arrays; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1999. Proceeding of the 29th European

Conference_Location

Leuven, Belgium

Print_ISBN

2-86332-245-1

Type

conf

Filename

1505446