DocumentCode :
1948268
Title :
Probing Semiconductor Devices on the Nanometer Scale
Author :
Vandervorst, W. ; Clarysse, T. ; Trenkler, T. ; Hantschel, T. ; Eyben, P. ; Haegeman, B. ; Stephenson, R. ; Wolf, P. De
Author_Institution :
IMEC, Leuven, Belgium
Volume :
1
fYear :
1999
fDate :
13-15 Sept. 1999
Firstpage :
46
Lastpage :
55
Keywords :
Chemical technology; Doping; Metrology; Nanoscale devices; Predictive models; Probes; Process design; Semiconductor devices; Semiconductor process modeling; Spatial resolution;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location :
Leuven, Belgium
Print_ISBN :
2-86332-245-1
Type :
conf
Filename :
1505448
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1948268
