Title :
Microscale tribology (friction) measurement and influence of crystal orientation and fabrication process
Author :
Chen, Quanfang ; Carman, Greg P.
Author_Institution :
Dept. of Mech. & Aerosp. Eng., California Univ., Los Angeles, CA, USA
Abstract :
A microscale tribology test system has been developed at UCLA to measure friction and wear in MEMS components. Test results indicate that microscale friction may not follow Amontons´ law that states the friction force is only related to the normal force with a coefficient of friction. In this study, test data indicate that the friction coefficient is not constant and it´s influenced by crystal orientation, apparent contact area, MEMS material, and fabrication process, as well as the normal force applied. Explanation for the discrepancy may be related to adhesion, which is a critical issue at microscale
Keywords :
crystal orientation; friction; micromechanical devices; wear; Amontons law; MEMS component; adhesion; crystal orientation; fabrication; friction measurement; microscale tribology; test system; wear measurement; Atomic force microscopy; Atomic measurements; Copper; Fabrication; Force measurement; Friction; Micromechanical devices; Surface morphology; System testing; Tribology;
Conference_Titel :
Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on
Conference_Location :
Miyazaki
Print_ISBN :
0-7803-5273-4
DOI :
10.1109/MEMSYS.2000.838596
