Title :
CMOS-based sensors and actuators
Author :
Van Steenkiste, F. ; Maes, D. ; Haspeslagh, L. ; Sedky, S. ; Van Gerwen, P. ; Vandergroen, S. ; Baert, K.
Author_Institution :
IMEC, Leuven, Belgium
Abstract :
In many applications, up to millions of sensors or actuators have to be connected to the outside world, making the monolithic integration of circuits mandatory. Monolithic integration is also pursued for mass-produced transducers. Today, monolithic devices include visible and IR imagers, displays, inkjet heads, biochemical and physical sensors. Monolithic integration of transducer-specific processes (such as micromachining) with standard CMOS processes is possible, albeit at an increase of process complexity
Keywords :
CMOS image sensors; CMOS integrated circuits; biosensors; chemical sensors; electric sensing devices; microsensors; CMOS-based sensors; IR imagers; biochemical sensors; displays; inkjet heads; mass-produced transducers; micromachining; monolithic integration; physical sensors; process complexity; transducer-specific processes; visible imagers; Actuators; Biosensors; CMOS process; Displays; Head; Image sensors; Infrared image sensors; Micromachining; Monolithic integrated circuits; Transducers;
Conference_Titel :
ASIC Conference 1998. Proceedings. Eleventh Annual IEEE International
Conference_Location :
Rochester, NY
Print_ISBN :
0-7803-4980-6
DOI :
10.1109/ASIC.1998.723047
