On the Basic Correlation between Polysilicon Resistor Linearity, Matching and 1/f Noise

Author

Da Rold, M. ; Van Huylenbroeck, S. ; Knuts, B. ; Simoen, E. ; Decoutere, S.

Author_Institution

IMEC, Leuven, Belgium

Volume

fYear

1999

fDate

13-15 Sept. 1999

Firstpage

648

Lastpage

651

Keywords

1f noise; Annealing; CMOS process; CMOS technology; Crystalline materials; Doping; Implants; Linearity; Resistors; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1999. Proceeding of the 29th European

Conference_Location

Leuven, Belgium

Print_ISBN

2-86332-245-1

Type

Filename

1505586

Link To Document