Title :
On the Basic Correlation between Polysilicon Resistor Linearity, Matching and 1/f Noise
Author :
Da Rold, M. ; Van Huylenbroeck, S. ; Knuts, B. ; Simoen, E. ; Decoutere, S.
Author_Institution :
IMEC, Leuven, Belgium
Keywords :
1f noise; Annealing; CMOS process; CMOS technology; Crystalline materials; Doping; Implants; Linearity; Resistors; Testing;
Conference_Titel :
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
Conference_Location :
Leuven, Belgium
Print_ISBN :
2-86332-245-1
