DocumentCode

1950980

Title

Simulation of a Coating Protection for an In Situ Ellipsometer in a CVD Furnace

Author

Poscher, Stefan ; Lehnert, Wolfgang ; Ryssel, Heiner

Author_Institution

Fraunhofer-Institut f¨ur Integrierte Schaltungen, Erlangen, Germany

Volume

1

fYear

1999

fDate

13-15 Sept. 1999

Firstpage

676

Lastpage

679

Keywords

Chemical sensors; Chemical vapor deposition; Coatings; Furnaces; Gas lasers; Laser beams; Nitrogen; Optical sensors; Protection; Semiconductor device modeling;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1999. Proceeding of the 29th European

Conference_Location

Leuven, Belgium

Print_ISBN

2-86332-245-1

Type

conf

Filename

1505593