• DocumentCode
    1951124
  • Title

    Analysis of defects in solid phase crystallized and laser crystallized unhydrogenated polysilicon thin film transistors

  • Author

    Pichon, L. ; Mercha, A. ; Bonnaud, O. ; Carin, R. ; Helen, Y. ; Mourgues, K. ; Raolt, F. ; Mohammed-Brahim, T.

  • Author_Institution
    Universite de Caen, France
  • Volume
    1
  • fYear
    1999
  • fDate
    13-15 Sept. 1999
  • Firstpage
    700
  • Lastpage
    703
  • Keywords
    Amorphous silicon; Annealing; Crystallization; Grain boundaries; Insulation; Plasma applications; Solid lasers; Substrates; Thin film transistors; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 1999. Proceeding of the 29th European
  • Conference_Location
    Leuven, Belgium
  • Print_ISBN
    2-86332-245-1
  • Type

    conf

  • Filename
    1505599
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1951124