• DocumentCode
    1951168
  • Title

    Measurement and FEM/BEM simulation of transverse effects in SAW resonators in lithium tantalate

  • Author

    Solal, Marc ; Chen, Li ; Gratier, Julien

  • Author_Institution
    TriQuint Semicond., Apopka, FL, USA
  • fYear
    2010
  • fDate
    11-14 Oct. 2010
  • Firstpage
    175
  • Lastpage
    180
  • Abstract
    It is well known than transverse effects like radiation in busbars are an important contribution in the loss of Leaky SAW resonators. Due to the complex nature of the wave and to the presence of several modes, scalar models are not sufficient to predict these effects. It is also known that the electrode gap has a strong impact on these effects. A periodic FEM/BEM model is presented and used to simulate the effect of the gap. Test devices are measured and compared with the simulation with a good agreement. The results show that smaller gaps are favorable.
  • Keywords
    boundary-elements methods; finite element analysis; lithium compounds; surface acoustic wave resonators; BEM simulation; FEM simulation; LiTaO3; SAW resonator; busbar; lithium tantalate; transverse effect; Dispersion; Electrodes; Finite element methods; Frequency measurement; Green´s function methods; Resonant frequency; Transducers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium (IUS), 2010 IEEE
  • Conference_Location
    San Diego, CA
  • ISSN
    1948-5719
  • Print_ISBN
    978-1-4577-0382-9
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2010.5935439
  • Filename
    5935439
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1951168