Title :
RESCUER-the revolution in multidomain simulations. I
Author :
Zubert, Mariusz ; Napieralski, Andrzej
Author_Institution :
Dept. of Microelectron. & Comput. Sci., Tech. Univ. Lodz, Poland
Abstract :
This paper presents an application of the new RESCUER simulation tool to modelling of physical phenomena in various modern silicon microstructures including silicon micromembrane models are demonstrated. Local accuracy vs. area discretisation for RESCUER model and other FEA simulator are also presented
Keywords :
elemental semiconductors; finite element analysis; membranes; micromechanical devices; silicon; MEMS device; RESCUER; Si; finite element analysis; micromembrane model; multidomain simulation; silicon microstructure; Biomembranes; Circuits; Computer science; Differential equations; Hardware design languages; Partial differential equations; Reactive power; SPICE; Silicon; Stability;
Conference_Titel :
Microelectronics, 2000. Proceedings. 2000 22nd International Conference on
Conference_Location :
Nis
Print_ISBN :
0-7803-5235-1
DOI :
10.1109/ICMEL.2000.838751
