Title :
Simulation of high sensitivity and stability surface acoustic wave NO2 gas sensor based on amplitude variations as measurand
Author :
El-Shennawy, K. ; Orabi, M.S. ; Taha, T.E.
Author_Institution :
Fac. of Eng. & Technol., Arab Acad. for Sci. & Technol. & Martime Transp., Alexandria, Egypt
Abstract :
This paper presents the use of Surface Acoustic Wave (SAW) devices as gas sensors utilizing Multi-Strip Coupler (MSC), where the amplitude of the SAW´s is the measured quantity, based on conductivity changes of the used sensor film. A theoretical model for SAW-MSC on LiNbO3 substrate and using Copper phthalocyanine (CuPc) as a sensor layer for NO2 gas sensor is illustrated. A computer simulation program is developed to obtain the variations in the insertion loss (IL) of the device under the adsorption influence of the substance to be detected, and its results are compared with the published experimental results
Keywords :
gas sensors; nitrogen compounds; surface acoustic wave sensors; LiNbO3 substrate; NO2; NO2 gas sensor; adsorption; amplitude measurement; computer simulation; copper phthalocyanine thin film; electrical conductivity; insertion loss; multistrip coupler; sensitivity; stability; surface acoustic wave device; Acoustic measurements; Acoustic sensors; Acoustic waves; Conductive films; Conductivity measurement; Gas detectors; Stability; Substrates; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Microelectronics, 2000. Proceedings. 2000 22nd International Conference on
Conference_Location :
Nis
Print_ISBN :
0-7803-5235-1
DOI :
10.1109/ICMEL.2000.838765
