Title :
Microelectronic manufacturing of a microsensor based on polyaniline for ammonia gas sensing
Author :
Ghita, Mihaela ; Gheorghe, Marian ; Visinoiu, Alina
Author_Institution :
Multidisciplinary Dept., Nat. Inst. for R&D in Microtechnol., Bucharest, Romania
Abstract :
The fabrication and operation of an ammonia chemoresistor is described. The sensor responds to changes in the resistance (impedance) of a thin layer of conductive polymer is due to changes in ammonia concentration. The polyaniline film was deposited by electroless plating (dipping) method on interdigitated array made by photolithographic technique. The PANI film was characterized by UV/VIS and IR Spectroscopy and respectively, Atomic Force Microscopy. Impedance Spectroscopy was used for sensor characterization
Keywords :
ammonia; conducting polymers; gas sensors; microsensors; polymer films; IR spectroscopy; NH3; UV/VIS spectroscopy; ammonia gas sensor; atomic force microscopy; chemoresistor; conductive polymer; dipping method; electroless plating; impedance spectroscopy; interdigitated array; microelectronic manufacturing; microsensor; photolithography; polyaniline film; Atomic force microscopy; Fabrication; Impedance; Infrared spectra; Manufacturing; Microelectronics; Microsensors; Polymers; Sensor phenomena and characterization; Spectroscopy;
Conference_Titel :
Microelectronics, 2000. Proceedings. 2000 22nd International Conference on
Conference_Location :
Nis
Print_ISBN :
0-7803-5235-1
DOI :
10.1109/ICMEL.2000.838767
