Title :
New shunt wiring technologies for high performance HDTV CCD image sensors
Author :
Orihara, K. ; Minami, K. ; Nakano, T. ; Hatano, K. ; Furumiya, M. ; Mutoh, N. ; Ohbo, M. ; Hokari, Y.
Author_Institution :
NEC Corp., Sagamihara, Japan
Abstract :
New shunt wiring technologies for HDTV FIT-CCD image sensors have been developed. They include tungsten direct shunt wiring structure. As well as a new layout for tungsten shunt lines and aluminum bus lines. A 1-inch format 2M pixel FIT-CCD image sensor was fabricated using these technologies. A low smear level, less than -110 dB, was achieved at 1 MHz frame shift frequency. Furthermore, a 1.2*10/sup 5/ electron charge handling capability was obtained up to 1.4 MHz frame shift frequency.<>
Keywords :
CCD image sensors; Fourier transform optics; high definition television; wiring; 1 to 1.4 MHz; 2 Mpixel; FIT-CCD image sensors; HDTV; bus lines; electron charge handling capability; frame shift frequency; shunt wiring technologies; smear level; Charge coupled image sensors; HDTV; Wiring;
Conference_Titel :
Electron Devices Meeting, 1992. IEDM '92. Technical Digest., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-0817-4
DOI :
10.1109/IEDM.1992.307319
