DocumentCode :
1951706
Title :
Particle Effects on Buried Oxide Leakage in Simox Materials
Author :
Hosack, H.H. ; Joyner, K.A. ; El-Ghor, M.K. ; Hollingsworth, J. ; Brown, G.A. ; Pollack, G.P.
Author_Institution :
Semiconductor Process and Design Center, Texas Instruments, Incorporated
fYear :
1992
fDate :
6-8 Oct. 1992
Firstpage :
98
Lastpage :
99
Keywords :
Conducting materials; Conductivity measurement; Electric variables measurement; Electrical resistance measurement; Instruments; Measurement techniques; Process design; Semiconductor materials; Stress measurement; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
SOI Conference, 1992. IEEE International
Conference_Location :
Ponte Vedra Beach, FL
ISSN :
1078-621X
Print_ISBN :
0-7803-7439-8
Type :
conf
DOI :
10.1109/SOI.1992.664813
Filename :
664813
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1951706
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