Title :
PZT piezoelectric coefficient extraction by PZT-actuated micro-beam characterization and modeling
Author :
Casset, F. ; Cueff, M. ; Suhm, A. ; Rhun, G. Le ; Abergel, J. ; Allain, M. ; Dieppedale, C. ; Ricart, T. ; Fanget, S. ; Renaux, P. ; Faralli, D. ; Ancey, P. ; Devos, A. ; Defay, E.
Author_Institution :
LETI, CEA, Grenoble, France
Abstract :
In this paper, we showed the realization and the characterization of a PZT-actuated micro-cantilever. The measurement and the modeling of its resonant frequency allow deducing the cantilever length. Using this value and combining the measurement and the modeling of the cantilever displacement amplitude at a given voltage, we extract PZT d31 piezoelectric coefficient as being 165±25 pm/V; which is among the highest values ever published for PZT thin films. It is worth noting that d31 is homogenous throughout the whole 200mm wafer.
Keywords :
cantilevers; circuit resonance; micromechanical devices; piezoelectric actuators; piezoelectric thin films; PZT piezoelectric coefficient extraction; PZT thin film; PZT-actuated microbeam characterization; PZT-actuated microcantilever; cantilever displacement amplitude; cantilever length; resonant frequency measurement; resonant frequency modeling; size 200 mm; Analytical models; Artificial intelligence; Finite element methods; Integrated optics; Micromechanical devices; Optical sensors; Silicon;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2012 13th International Conference on
Conference_Location :
Cascais
Print_ISBN :
978-1-4673-1512-8
DOI :
10.1109/ESimE.2012.6191704
