Single-mode ring waveguide resonator on SAW

Author

Biryukov, Sergey V. ; Schmidt, Hagen ; Weihnacht, Manfred

Author_Institution

IFW Dresden, Dresden, Germany

fYear

2010

fDate

11-14 Oct. 2010

Firstpage

2099

Lastpage

2102

Abstract

The recently proposed new regular electrode structure called ring waveguide resonator (RWR) on surface acoustic waves (SAW) is optimized to have a single radial mode excitation. The structure consists of a gold (Au) interdigital transducer (IDT) in the form of a ring placed on the Z-cut of aluminum nitride (AIN). The IDT itself creates a waveguide effect on the substrate. The electrical admittance of RWR as a function of frequency has a single peak corresponding to the excited radial mode. The peak has a high quality factor. The electrical admittance of RWR does not have sidelobes. The structure is evaluated by 3D finite element method (FEM).

Keywords

electric admittance; finite element analysis; surface acoustic wave waveguides; transducers; 3D finite element method; AlN; Au; FEM; RWR; SAW; aluminum nitride; electrical admittance; interdigital transducer; radial mode excitation; single-mode ring waveguide resonator; surface acoustic waves; Admittance; Electrodes; Finite element methods; Q factor; Resonant frequency; Surface acoustic waves; Three dimensional displays;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2010 IEEE

Conference_Location

San Diego, CA

ISSN

1948-5719

Print_ISBN

978-1-4577-0382-9

Type

conf

DOI

10.1109/ULTSYM.2010.5935471

Filename

5935471