DocumentCode
1951878
Title
Q-factor estimation of fabricated MEMS parallel-plate variable capacitors in MUMPs
Author
Elshurafa, Amro M. ; El-Masry, Ezz I.
Author_Institution
Dept. of Electr. & Comput. Eng., Dalhousie Univ., Halifax, NS, Canada
fYear
2004
fDate
20-23 June 2004
Firstpage
109
Lastpage
112
Abstract
This paper gives a brief review of both the MUMPs technology and the common micro-machined parallel plate tunable capacitors. Further, several factors that contribute in creating discrepancy between designed and measured capacitance and/or degrading the quality factor of the MEMS variable capacitor are discussed. Finally, a novel and extremely simple relation that anticipates the value of the quality factor of the fabricated variable capacitors is introduced.
Keywords
Q-factor; capacitance; micromechanical devices; varactors; MEMS parallel plate variable capacitors; Q-factor estimation; capacitance; micromachined parallel plate tunable capacitors; multiuser MEMS process; quality factor; Capacitance measurement; Capacitors; Electrostatics; Fabrication; Inductors; Microelectromechanical devices; Micromechanical devices; Q factor; Radio frequency; Varactors;
fLanguage
English
Publisher
ieee
Conference_Titel
Circuits and Systems, 2004. NEWCAS 2004. The 2nd Annual IEEE Northeast Workshop on
Print_ISBN
0-7803-8322-2
Type
conf
DOI
10.1109/NEWCAS.2004.1359034
Filename
1359034
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