• DocumentCode
    1952180
  • Title

    Schematic driven MEMS design

  • Author

    Meiners, Mirco ; Sommer, Ralf ; Graeb, Helmut

  • Author_Institution
    Automotive Electron., Robert Bosch GmbH, Reutlingen, Germany
  • fYear
    2012
  • fDate
    19-21 Sept. 2012
  • Firstpage
    117
  • Lastpage
    120
  • Abstract
    Microelectromechanical systems are important components for so-called cyber-physical systems. If a seamless MEMS design methodology for monolithic and hybrid systems overcomes current tool and workflow discrepancies in MEMS and IC design flows, further capabilities can be made available. This paper gives an overview of requirements on and solution approaches for an integrated MEMS/ASIC design flow.
  • Keywords
    application specific integrated circuits; integrated circuit design; micromechanical devices; cyber-physical systems; hybrid systems; integrated MEMS-ASIC design flow; microelectromechanical systems; monolithic systems; schematic driven MEMS design; seamless design methodology; tool discrepancies; workflow discrepancies; Analytical models; Application specific integrated circuits; Integrated circuit modeling; Layout; Micromechanical devices; Solid modeling; ASIC; MEMS; design flow; seamless design; sensor system;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD), 2012 International Conference on
  • Conference_Location
    Seville
  • Print_ISBN
    978-1-4673-0685-0
  • Type

    conf

  • DOI
    10.1109/SMACD.2012.6339431
  • Filename
    6339431