DocumentCode
1952180
Title
Schematic driven MEMS design
Author
Meiners, Mirco ; Sommer, Ralf ; Graeb, Helmut
Author_Institution
Automotive Electron., Robert Bosch GmbH, Reutlingen, Germany
fYear
2012
fDate
19-21 Sept. 2012
Firstpage
117
Lastpage
120
Abstract
Microelectromechanical systems are important components for so-called cyber-physical systems. If a seamless MEMS design methodology for monolithic and hybrid systems overcomes current tool and workflow discrepancies in MEMS and IC design flows, further capabilities can be made available. This paper gives an overview of requirements on and solution approaches for an integrated MEMS/ASIC design flow.
Keywords
application specific integrated circuits; integrated circuit design; micromechanical devices; cyber-physical systems; hybrid systems; integrated MEMS-ASIC design flow; microelectromechanical systems; monolithic systems; schematic driven MEMS design; seamless design methodology; tool discrepancies; workflow discrepancies; Analytical models; Application specific integrated circuits; Integrated circuit modeling; Layout; Micromechanical devices; Solid modeling; ASIC; MEMS; design flow; seamless design; sensor system;
fLanguage
English
Publisher
ieee
Conference_Titel
Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD), 2012 International Conference on
Conference_Location
Seville
Print_ISBN
978-1-4673-0685-0
Type
conf
DOI
10.1109/SMACD.2012.6339431
Filename
6339431
Link To Document