Title :
A novel software environment for design and simulation of piezoMEMS
Author :
Cruau, A. ; Schröpfer, G. ; Lorenz, G.
Author_Institution :
Coventor sarl, Villebon, France
Abstract :
This paper describes the use of a novel design and simulation platform for piezoMEMS devices and systems. This platform called MEMS+ is part of a complete environment where the seamless link to standard EDA and CAD tools enables complete and easy system simulation. The methodology is applied to two piezodevices examples, a unimorph cantilever energy harvester and a piston micromirror.
Keywords :
CAD; cantilevers; electronic design automation; energy harvesting; micromechanical devices; micromirrors; piezoelectric transducers; CAD tools; MEMS+; piezoMEMS device design; piezoMEMS device simulation platform; piston micromirror; software environment; standard EDA; unimorph cantilever energy harvester; Finite element methods; Integrated circuit modeling; Libraries; Mathematical model; Micromechanical devices; Solid modeling; design platform; energy harvester; micromirror; piezoMEMS; system modelling;
Conference_Titel :
Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD), 2012 International Conference on
Conference_Location :
Seville
Print_ISBN :
978-1-4673-0685-0
DOI :
10.1109/SMACD.2012.6339432
