DocumentCode

1952252

Title

Prediction of the Radiation Response of Simox Using Spectroscopic Ellipsometry

Author

McMarr, P.J. ; Mrstik, B.J. ; Lawrence, R.K.

Author_Institution

Naval Research Laboratory, Washington, DC

fYear

1992

fDate

6-8 Oct. 1992

Firstpage

104

Lastpage

105

Keywords

Annealing; DC generators; Ellipsometry; Fabrication; Implants; Laboratories; MOS capacitors; Performance evaluation; Silicon compounds; Spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

SOI Conference, 1992. IEEE International

Conference_Location

Ponte Vedra Beach, FL

ISSN

1078-621X

Print_ISBN

0-7803-7439-8

Type

conf

DOI

10.1109/SOI.1992.664816

Filename

664816