Title :
A temperature compensation subsystem for an IMEMS CMOS pressure sensor
Author :
Chavez, Fernando ; Olmos, Alfredo ; Leme, Carlos Azeredo ; Charry, Edgar
Author_Institution :
Lab. de Sistemas Integraveis, Sao Paulo Univ., Brazil
Abstract :
This work presents a temperature compensation subsystem for a piezoresistive pressure microsensor system operating between 0-50 kPa for medical purposes. Different full scale span and offset voltage can be compensated easily against temperature effects with a CMOS circuit that generates two temperature dependent voltages with 64 possible settings of temperature coefficients: the drive voltage of the active bridge and the reference voltage of the offset cancellation DAC. The subsystem showed a total power dissipation of approximately 3 mW working with 3 volts of power supply
Keywords :
CMOS integrated circuits; biomedical electronics; biomedical transducers; compensation; microsensors; piezoresistive devices; pressure sensors; 0 to 50 kPa; 3 V; 3 mW; CMOS pressure sensor; IMEMS; active bridge; drive voltage; medical applications; offset cancellation DAC; offset voltage; piezoresistive microsensor system; temperature coefficients; temperature compensation subsystem; temperature effects; total power dissipation; Bridge circuits; Calibration; Fabrication; Piezoresistance; Resistors; Sensor arrays; Sensor phenomena and characterization; Temperature dependence; Temperature sensors; Voltage;
Conference_Titel :
ASIC Conference 1998. Proceedings. Eleventh Annual IEEE International
Conference_Location :
Rochester, NY
Print_ISBN :
0-7803-4980-6
DOI :
10.1109/ASIC.1998.723056
