Title :
Geometrical analysis of a MEMS microphone
Author :
Rivadeneyra, Almudena ; Martinez-Marti, F. ; Palma, Alberto J. ; Banqueri, Jesús ; Bernardo, Raúl Muñoz
Author_Institution :
Dipt. Electron. y Tecnol. de Comput., Univ. of Granada, Granada, Spain
Abstract :
This document presents a study of variations in a MEMS microphone geometry in order to find the best compromise between its capacitance response and its size. It has been shown that COMSOL can achieve accurate results when compared to theoretical models. This is an excellent advantage due to the results of the simulation can provide not only verification concerning the validity of the physical assumptions made in defining the model but also simulations can be used to help determine the design parameters that will optimize the device performance thus minimizing the time, effort, and expense required to construct and test an actual device.
Keywords :
electronic engineering computing; geometry; micromechanical devices; microphones; COMSOL; MEMS microphone; capacitance response; design parameters; geometrical analysis; theoretical model; Analytical models; Capacitance; Frequency response; Geometry; Integrated circuit modeling; Micromechanical devices; Microphones; MEMS sensor; PolyMUMPs process; capacitive microphone; mushroom shape;
Conference_Titel :
Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD), 2012 International Conference on
Conference_Location :
Seville
Print_ISBN :
978-1-4673-0685-0
DOI :
10.1109/SMACD.2012.6339444
