DocumentCode :
1952449
Title :
Photocurrent Measurements of Electron Traps in Simox
Author :
Lawrence, R.K. ; Hughes, H.L. ; Revesz, A.G.
Author_Institution :
Naval Research Laboratory, Washington, D.C.
fYear :
1992
fDate :
6-8 Oct. 1992
Firstpage :
106
Lastpage :
107
Keywords :
Annealing; Argon; Capacitance-voltage characteristics; Electron traps; Implants; Laboratories; Lamps; Photoconductivity; Semiconductor films; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
SOI Conference, 1992. IEEE International
Conference_Location :
Ponte Vedra Beach, FL
ISSN :
1078-621X
Print_ISBN :
0-7803-7439-8
Type :
conf
DOI :
10.1109/SOI.1992.664817
Filename :
664817
Link To Document :
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