Title :
Photocurrent Measurements of Electron Traps in Simox
Author :
Lawrence, R.K. ; Hughes, H.L. ; Revesz, A.G.
Author_Institution :
Naval Research Laboratory, Washington, D.C.
Keywords :
Annealing; Argon; Capacitance-voltage characteristics; Electron traps; Implants; Laboratories; Lamps; Photoconductivity; Semiconductor films; Voltage;
Conference_Titel :
SOI Conference, 1992. IEEE International
Conference_Location :
Ponte Vedra Beach, FL
Print_ISBN :
0-7803-7439-8
DOI :
10.1109/SOI.1992.664817