DocumentCode

1952449

Title

Photocurrent Measurements of Electron Traps in Simox

Author

Lawrence, R.K. ; Hughes, H.L. ; Revesz, A.G.

Author_Institution

Naval Research Laboratory, Washington, D.C.

fYear

1992

fDate

6-8 Oct. 1992

Firstpage

106

Lastpage

107

Keywords

Annealing; Argon; Capacitance-voltage characteristics; Electron traps; Implants; Laboratories; Lamps; Photoconductivity; Semiconductor films; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

SOI Conference, 1992. IEEE International

Conference_Location

Ponte Vedra Beach, FL

ISSN

1078-621X

Print_ISBN

0-7803-7439-8

Type

conf

DOI

10.1109/SOI.1992.664817

Filename

664817