DocumentCode :
1952628
Title :
Silicon on Diamond (sod) Mosfets
Author :
Karulkar, Pramod C. ; Annamalai, N.K.
Author_Institution :
MIT Lincoln Laboratory, Lexington, MA
fYear :
1992
fDate :
6-8 Oct. 1992
Firstpage :
108
Lastpage :
109
Keywords :
Conducting materials; Dielectric materials; Fabrication; Laboratories; MOSFETs; Semiconductor films; Semiconductor materials; Silicon; Substrates; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
SOI Conference, 1992. IEEE International
Conference_Location :
Ponte Vedra Beach, FL
ISSN :
1078-621X
Print_ISBN :
0-7803-7439-8
Type :
conf
DOI :
10.1109/SOI.1992.664818
Filename :
664818
Link To Document :
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