Title :
Silicon on Diamond (sod) Mosfets
Author :
Karulkar, Pramod C. ; Annamalai, N.K.
Author_Institution :
MIT Lincoln Laboratory, Lexington, MA
Keywords :
Conducting materials; Dielectric materials; Fabrication; Laboratories; MOSFETs; Semiconductor films; Semiconductor materials; Silicon; Substrates; Temperature;
Conference_Titel :
SOI Conference, 1992. IEEE International
Conference_Location :
Ponte Vedra Beach, FL
Print_ISBN :
0-7803-7439-8
DOI :
10.1109/SOI.1992.664818