Title :
Simulation of thin film field emitter array cathodes
Author_Institution :
Div. of Electron Devices, Litton Syst. Inc., San Carlos, CA, USA
Abstract :
In typical field emitter arrays, individual gates have micrometer dimensions, whereas emitter tip radii are generally two orders of magnitude smaller. Because of this large size differential, it is necessary to use nonuniform meshes to accurately model such devices in a single computer run. This paper describes additions to the deformable triangular mesh finite element based beam optics code of the author, DEMEOS, which enable convenient simulation of field emitter array cathodes.<>
Keywords :
cathodes; digital simulation; electron field emission; electronic engineering computing; mesh generation; modelling; thick film devices; vacuum microelectronics; DEMEOS; FEM; deformable triangular mesh; emission model; field emitter array cathodes; finite element based beam optics code; nonuniform meshes; simulation; thin film cathodes; Cathodes; Electron emission; Mesh generation; Modeling; Simulation; Thick film devices; Vacuum microelectronics;
Conference_Titel :
Electron Devices Meeting, 1992. IEDM '92. Technical Digest., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-0817-4
DOI :
10.1109/IEDM.1992.307382
