DocumentCode :
1953060
Title :
Modelling of the Electric Field Assisted Capillarity Effect used for the fabrication of hollow polymer microstructures
Author :
Tonry, C. ; Patel, M. ; Bailey, C. ; Desmuliez, M.P.Y. ; Cargill, S. ; Yu, W.
Author_Institution :
Sch. of Comput. & Math. Sci., Univ. of Greenwich, London, UK
fYear :
2012
fDate :
16-18 April 2012
Firstpage :
42375
Lastpage :
42527
Abstract :
Electric Field Assisted Capillarity (EFAC) is a novel process which has the potential for the single step fabrication of hollow polymer microstructures. The process has been shown to work experimentally on a microscale level using Polydimethylsiloxane (PDMS). The process makes use of both the electrohydrodynamics of polymer at a microscale and the voltage enhanced capillary force exerted on the polymer. This paper discusses the results of a two-dimensional numerical simulation of this process. The results presented use a patterned master electrode producing encapsulated microchannels in the polymer. The simulations demonstrate how the differing contact angles between the polymer and the walls of the master electrode affect the thickness of the top surface of the formed microstructures. It also specifies the conditions necessary for the successful fabrication of such microstructures.
Keywords :
hydrodynamics; lithography; polymers; electric field assisted capillarity effect; electrohydrodynamics; encapsulated microchannels; hollow polymer microstructures; patterned master electrode; polydimethylsiloxane; single step fabrication; Electrodes; Electronic mail; Manganese; Numerical models; Polymers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2012 13th International Conference on
Conference_Location :
Cascais
Print_ISBN :
978-1-4673-1512-8
Type :
conf
DOI :
10.1109/ESimE.2012.6191758
Filename :
6191758
Link To Document :
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