• DocumentCode
    1953163
  • Title

    Assessment of thermo-mechanical stresses in Low Temperature Joining Technology

  • Author

    Herboth, Thomas ; Früh, Christiane ; Günther, Michael ; Wilde, Jürgen

  • Author_Institution
    Robert Bosch GmbH, Schwieberdingen, Germany
  • fYear
    2012
  • fDate
    16-18 April 2012
  • Firstpage
    42376
  • Lastpage
    42558
  • Abstract
    The Low Temperature Joining Technology (LTJT) creates silver joints by a sintering process. It is an alternative die-attach technology to soldering. To initiate the sintering process the temperature has to be raised above ~ 215°C. The quality of a sintered joint is strongly enhanced by applying pressure to the specimen during the process, thus reducing the porosity in the sintered material. After the interconnect process, residual stresses occur in the sintered material, as well as in the joined parts. The examined specimen was a silicon MOSFET attached to a copper substrate at a sintering pressure of 50 MPa. The scope of this paper is to provide information about residual stress after production and thermo-mechanical stresses during thermal cycling. The focus is put on the investigation of the reliability of sintered silver by simulation.
  • Keywords
    joining processes; microassembling; sintering; thermal stresses; copper substrate; die-attach technology; interconnect process; low temperature joining technology; porosity; residual stresses; silicon MOSFET; silver joints; sintering process; soldering; thermal cycling; thermo-mechanical stresses; Copper; MOSFET circuits; Nickel; Thermomechanical processes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2012 13th International Conference on
  • Conference_Location
    Cascais
  • Print_ISBN
    978-1-4673-1512-8
  • Type

    conf

  • DOI
    10.1109/ESimE.2012.6191762
  • Filename
    6191762