Title :
A domain decomposition method for the simulation of fracture in polysilicon MEMS
Author :
Confalonieri, Federica ; Cocchetti, Giuseppe ; Ghisi, Aldo ; Corigliano, Alberto
Author_Institution :
Dept. of Struct. Eng., Politec. di Milano, Milan, Italy
Abstract :
In this paper, a domain decomposition approach is proposed to efficiently address the finite element simulation of fracture phenomena in polysilicon MEMS under impact dynamics. The analysis is performed at the microscale, i.e. at the level of the microstructural parts composing the microsystem, in order to simulate local failure mechanisms developing in critical regions.
Keywords :
elemental semiconductors; failure analysis; finite element analysis; fracture; micromechanical devices; silicon; Si; domain decomposition method; finite element simulation; fracture phenomena; fracture simulation; impact dynamics; local failure mechanism; microstructural part; microsystem; polysilicon MEMS; Computational modeling; Computers; Micromechanical devices; Numerical models;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2012 13th International Conference on
Conference_Location :
Cascais
Print_ISBN :
978-1-4673-1512-8
DOI :
10.1109/ESimE.2012.6191769
