• DocumentCode
    1953443
  • Title

    A low cost monolithic accelerometer; product/technology update

  • Author

    Sherman, S.J. ; Tsang, W.K. ; Core, T.A. ; Payne, R.S. ; Quinn, D.E. ; Chau, K.H.-L. ; Farash, J.A. ; Baum, S.K.

  • Author_Institution
    Analog Devices Inc., Wilmington, MA, USA
  • fYear
    1992
  • fDate
    13-16 Dec. 1992
  • Firstpage
    501
  • Lastpage
    504
  • Abstract
    Described is a complete monolithic accelerometer, which combines a surface micromachined polysilicon sensor with BiMOS interface circuitry. As much as possible, the device exploits existing high volume wafer fabrication technology. Ultimately, this scheme should make acceleration sensing a commodity function, with signal span accuracy approaching 5%. The circuit architecture is reviewed and recent characterization results reported.<>
  • Keywords
    BIMOS integrated circuits; accelerometers; elemental semiconductors; integrated circuit technology; silicon; BiMOS interface circuitry; Si; monolithic accelerometer; surface micromachined polysilicon sensor; wafer fabrication; Acceleration measurement; BIMOS integrated circuits; Integrated circuit fabrication; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1992. IEDM '92. Technical Digest., International
  • Conference_Location
    San Francisco, CA, USA
  • ISSN
    0163-1918
  • Print_ISBN
    0-7803-0817-4
  • Type

    conf

  • DOI
    10.1109/IEDM.1992.307410
  • Filename
    307410
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1953443