Title :
A parametric multilevel MEMS simulation methodology using finite element method and mesh morphing
Author :
Kolchuzhin, Vladimir A. ; Mehner, Jan E.
Author_Institution :
Dept. of Microsyst. & Precision Eng., Chemnitz Univ. of Technol., Chemnitz, Germany
Abstract :
The MEMS designing is a very challenging and interdisciplinary task. The paper deals with advanced computational methodology required to extend the considered effects within the ordinary FE-analyses taking into account parameter variation at the physic and system levels.
Keywords :
finite element analysis; micromechanical devices; FE-analysis; MEMS design; computational methodology; finite element method; mesh morphing; parameter variation; parametric multilevel MEMS simulation methodology; physic level; system level; Analytical models; Computational modeling; Design automation; Fingers; Magnetic domains; Micromechanical devices; Solid modeling;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2012 13th International Conference on
Conference_Location :
Cascais
Print_ISBN :
978-1-4673-1512-8
DOI :
10.1109/ESimE.2012.6191776
