Analysis of the SH wave radiation from the SAW devices

Author

Matsuda, S. ; Miura, M. ; Matsuda, T. ; Ueda, M. ; Sato, Y. ; Hashimoto, K.

Author_Institution

Taiyo Yuden Co., Ltd., Akashi, Japan

fYear

2010

fDate

11-14 Oct. 2010

Firstpage

424

Lastpage

426

Abstract

We prepared SAW resonators using a SiO₂/Cu/ 0°YX-LiNbO₃ structure. In this configuration, apodized interdigital transducers (IDTs) are commonly adopted for suppressing series of spurious responses caused by the transverse modes. However, the apodization is shown to deteriorates the normalized Q factor at the anti-resonance frequency and its influence grows when the normalized aperture width is narrow. From the optical measurement of these devices, the Q degradation is found to be mainly due to the radiation of SH waves from the resonator. The radiation consists of the bulk, diffraction, and back-scattering waves and depends on the steepness of the apodization.

Keywords

Q-factor; acoustic imaging; copper; interdigital transducers; lithium compounds; optical images; optical variables measurement; silicon compounds; surface acoustic wave resonators; Q factor; SAW devices; SAW resonators; SiO₂-Cu-LiNbO₃; apodized interdigital transducers; back-scattering waves; diffraction; normalized aperture width; optical measurement; shear horizontal wave radiation; transverse modes; Apertures; Optical resonators; Optical surface waves; Optical variables measurement; Q factor; Surface acoustic waves; LiNbO3; Q degradation; apodization; optical measurement; radiation of SH waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2010 IEEE

Conference_Location

San Diego, CA

ISSN

1948-5719

Print_ISBN

978-1-4577-0382-9

Type

conf

DOI

10.1109/ULTSYM.2010.5935555

Filename

5935555