Title :
New write/erase operation technology for flash EEPROM cells to improve the read disturb characteristics
Author :
Endoh, T. ; Iizuka, H. ; Aritome, S. ; Shirota, R. ; Masuoka, F.
Author_Institution :
ULSI Res. Center, Toshiba Corp., Kawasaki, Japan
Abstract :
This paper describes the new write/erase operation methods in order to improve the read disturb characteristics for flash EEPROM cells which are written by channel hot electron injection and erased by F-N tunneling emission from the floating gate to the substrate. The new operation method is either applying a reverse polarity pulse after each erase pulse or applying a series of shorter erase pulses instead of a long single erase pulse. It is confirmed that by using the above operation method, the leakage current can be suppressed, and then the read disturb life time after 10/sup 5/ cycles W/E operation is more than 10 times longer in comparison with the conventional method.<>
Keywords :
EPROM; hole traps; hot carriers; integrated memory circuits; leakage currents; tunnelling; F-N tunneling emission; channel hot electron injection; erase pulses; flash EEPROM cells; floating gate; leakage current suppression; read disturb characteristics; reverse polarity pulse; write/erase operation technology; Charge carrier lifetime; EPROM; Hot carriers; Leakage currents; Semiconductor memories; Tunneling;
Conference_Titel :
Electron Devices Meeting, 1992. IEDM '92. Technical Digest., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-0817-4
DOI :
10.1109/IEDM.1992.307433