Title :
Fatigue characteristics of Si movable comb inserted into MEMS optical devices
Author :
Shimazu, Takayuki ; Sunaga, Kel ; Katayama, Masaru
Author_Institution :
Opt. Commun. R&D Labs., Sumitomo Electr. Ind. Ltd., Yokohama, Japan
Abstract :
Fatigue life for the moving part had been inspected at the real operation condition for the first time. The obtained fracture rate was about 0.3 indicated the MEMS devices were reliable enough for practical usage.
Keywords :
fatigue; micro-optics; micromechanical devices; optical communication equipment; silicon; MEMS optical devices; Si; Si movable comb; fatigue; fracture rate;
Conference_Titel :
Optical Fiber Communication Conference, 2004. OFC 2004
Conference_Location :
Los Angeles, CA, USA
Print_ISBN :
1-55752-772-5
