DocumentCode
1954608
Title
In-situ cleaning for highly reliable 1.3-/spl mu/m InGaAlAs buried heterostructure laser
Author
Sato, H. ; Tsuchiya, Takao ; Kitatani, T. ; Taike, A. ; Uchiyama, H. ; Shinoda, K. ; Takahashi, N. ; Nakahara, K. ; Aoki, M.
Author_Institution
Central Res. Lab., Hitachi Ltd., Tokyo, Japan
Volume
1
fYear
2004
fDate
23-27 Feb. 2004
Firstpage
151
Abstract
An in-situ cleaned and regrown 1.3-/spl mu/m InGaAIAs buried heterostructure laser was fabricated for the first time. The degradation of its driving current was about 1% after a 2000-hour aging test.
Keywords
III-V semiconductors; ageing; cleaning; gallium arsenide; gallium compounds; indium compounds; optical fabrication; semiconductor device reliability; semiconductor growth; semiconductor lasers; 1.3 mum; 2000 hour; InGaAlAs; InGaAlAs laser; aging test; buried heterostructure laser; in-situ cleaning; laser fabrication;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Fiber Communication Conference, 2004. OFC 2004
Conference_Location
Los Angeles, CA, USA
Print_ISBN
1-55752-772-5
Type
conf
Filename
1359215
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