• DocumentCode
    1955174
  • Title

    Soi High Voltage Ldmos and Ligbt Transistors with a Buried Diode and Surface P-Layer

  • Author

    Pein, B. ; Arnold, E. ; Baumgart, H. ; Egloff, R. ; Letavic, T. ; Merchant, S. ; Mukherjee, S.

  • Author_Institution
    Philips Laboratories, Briarcliff Manor, N.Y.
  • fYear
    1992
  • fDate
    6-8 Oct. 1992
  • Firstpage
    146
  • Lastpage
    147
  • Keywords
    Etching; Integrated circuit technology; Laboratories; Power integrated circuits; Power semiconductor devices; Semiconductor diodes; Silicon; Switches; Transistors; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    SOI Conference, 1992. IEEE International
  • Conference_Location
    Ponte Vedra Beach, FL
  • ISSN
    1078-621X
  • Print_ISBN
    0-7803-7439-8
  • Type

    conf

  • DOI
    10.1109/SOI.1992.664834
  • Filename
    664834
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1955174