Title :
Soi High Voltage Ldmos and Ligbt Transistors with a Buried Diode and Surface P-Layer
Author :
Pein, B. ; Arnold, E. ; Baumgart, H. ; Egloff, R. ; Letavic, T. ; Merchant, S. ; Mukherjee, S.
Author_Institution :
Philips Laboratories, Briarcliff Manor, N.Y.
Keywords :
Etching; Integrated circuit technology; Laboratories; Power integrated circuits; Power semiconductor devices; Semiconductor diodes; Silicon; Switches; Transistors; Voltage;
Conference_Titel :
SOI Conference, 1992. IEEE International
Conference_Location :
Ponte Vedra Beach, FL
Print_ISBN :
0-7803-7439-8
DOI :
10.1109/SOI.1992.664834