DocumentCode :
1955333
Title :
cMUT sensor for applications as a wide-band acoustic receiver in the MHz range
Author :
Caliano, Giosué ; Savoia, Alessandro Stuart ; Longo, Cristina ; Caronti, Alessandro ; Pappalardo, Massimo ; Iula, Antonio ; Rothmann, Samantha
Author_Institution :
Dept. of Electron. Eng., Univ. Roma Tre, Rome, Italy
fYear :
2010
fDate :
11-14 Oct. 2010
Firstpage :
1869
Lastpage :
1872
Abstract :
For meticulous calibration of ultrasonic probes, hydrophones are usually used but it is difficult to find hydrophones that can operate up to 30 MHz with a very large bandwidth. Our group has a long experience in fabrication of the new cMUT transducers; these devices can easily operate in the high frequency range due to the silicon micromachining technology used. In order to calibrate large bandwidth high frequency cMUT array probes, we designed and fabricated a single element transducer on the same wafer used for the cMUT array. Since the sensor is fabricated on the same wafer, it has the same characteristics of the probe and, hence, the measurements are possible in the same operative range (3-20 MHz). Our initial results for cMUT single-element sensor are promising.
Keywords :
acoustic receivers; hydrophones; micromachining; ultrasonic transducers; cMUT transducers; hydrophones; silicon micromachining technology; single element transducer; ultrasonic probes; wide-band acoustic receiver; Acoustics; Arrays; Fabrication; Probes; Sensitivity; Silicon; Transducers; Hydrophone; Micromachining; Monoelement; cMUT;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium (IUS), 2010 IEEE
Conference_Location :
San Diego, CA
ISSN :
1948-5719
Print_ISBN :
978-1-4577-0382-9
Type :
conf
DOI :
10.1109/ULTSYM.2010.5935620
Filename :
5935620
Link To Document :
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