Title :
Industrial design of a solid-state wind sensor
Author :
Makinwa, K.A.A. ; Huijsing, J.H. ; Hagedoorn, A.
Author_Institution :
Delft Univ. of Technol., Netherlands
Abstract :
This paper describes the industrial realization of a solid-state wind sensor, that is one without moving parts. The sensor´s key component is a heated silicon chip that is nonuniformly cooled by the wind. The resulting flow-induced temperature gradient in the chip is measured by integrated thermopiles. Their output is digitized and processed by a microprocessor in order to determine wind speed and direction. For wind speeds between 0.1 and 25 m/s, the errors in the computed wind speed and direction are less than 0.5 m/s (or ±3%) and ±3° respectively
Keywords :
computerised instrumentation; electric sensing devices; elemental semiconductors; flow measurement; packaging; silicon; thermopiles; velocity measurement; wind; 0.1 to 2.5 m/s; Si; Si heated chip; errors; flow-induced temperature gradient; integrated thermopiles; microprocessor; packaging; solid state wind sensor; wind direction; wind speed; Acoustic measurements; Packaging; Semiconductor device measurement; Sensor phenomena and characterization; Silicon; Solid state circuits; Temperature sensors; Thermal sensors; Velocity measurement; Wind speed;
Conference_Titel :
Sensors for Industry, 2001. Proceedings of the First ISA/IEEE Conference
Conference_Location :
Rosemont, IL
Print_ISBN :
0-7803-6659-X
DOI :
10.1109/SFICON.2001.968501
