Title :
Research on the resonant frequency formula of V-shaped cantilevers
Author :
Yang, Kai ; Li, Zhigang ; Yupeng Jing ; Chen, Dapeng ; Ye, Tianchun
Author_Institution :
Inst. of Microelectron., Lab. of Silicon Devices & Integrated Technol., Chinese Acad. of Sci., Beijing
Abstract :
This paper deduces a remarkably precise analytical formula for calculating the fundamental resonant frequency of V-shaped cantilevers using Rayleigh-Ritz method. This analytical formula, which is very convenient for MEMS sensor design, is then validated by ANSYS simulation. This formula raises a new perspective that, among all the V-shaped cantilevers, the simplest triangular cantilever can lead to maximum resonant frequency and highest sensitivity.
Keywords :
Rayleigh-Ritz methods; cantilevers; microsensors; ANSYS simulation; MEMS sensor design; Rayleigh-Ritz method; V-shaped cantilevers; resonant frequency formula; Analytical models; Boundary conditions; Geometry; Kinetic energy; Micromechanical devices; Resonance; Resonant frequency; Shape; Springs; Systems engineering and theory; V-shaped; cantilever; fundamental resonant frequency; triangular;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
Conference_Location :
Shenzhen
Print_ISBN :
978-1-4244-4629-2
Electronic_ISBN :
978-1-4244-4630-8
DOI :
10.1109/NEMS.2009.5068527
