Research on the resonant frequency formula of V-shaped cantilevers

Author

Yang, Kai ; Li, Zhigang ; Yupeng Jing ; Chen, Dapeng ; Ye, Tianchun

Author_Institution

Inst. of Microelectron., Lab. of Silicon Devices & Integrated Technol., Chinese Acad. of Sci., Beijing

fYear

2009

fDate

5-8 Jan. 2009

Firstpage

59

Lastpage

62

Abstract

This paper deduces a remarkably precise analytical formula for calculating the fundamental resonant frequency of V-shaped cantilevers using Rayleigh-Ritz method. This analytical formula, which is very convenient for MEMS sensor design, is then validated by ANSYS simulation. This formula raises a new perspective that, among all the V-shaped cantilevers, the simplest triangular cantilever can lead to maximum resonant frequency and highest sensitivity.

Keywords

Rayleigh-Ritz methods; cantilevers; microsensors; ANSYS simulation; MEMS sensor design; Rayleigh-Ritz method; V-shaped cantilevers; resonant frequency formula; Analytical models; Boundary conditions; Geometry; Kinetic energy; Micromechanical devices; Resonance; Resonant frequency; Shape; Springs; Systems engineering and theory; V-shaped; cantilever; fundamental resonant frequency; triangular;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on

Conference_Location

Shenzhen

Print_ISBN

978-1-4244-4629-2

Electronic_ISBN

978-1-4244-4630-8

Type

conf

DOI

10.1109/NEMS.2009.5068527

Filename

5068527