Title :
A white-light source operated polymer-based micromachined Fabry-Perot chemo/biosensor
Author :
Zhang, Tianhua ; Gong, Zhongcheng ; Que, Long
Author_Institution :
Inst. for Micromanufacturing, Louisiana Tech Univ., Ruston, LA
Abstract :
A white-light source operated polymer-based micromachined Fabry-Perot chemo/biosensor is reported for the first time. It is a refractive-index sensitive optical sensor. The transducing signal varies upon the changes of the effective index of refraction in the sensing area, which is the Fabry-Perot cavity. This chemo/biosensor is made with PDMS and glass. Specifically, the micromachined Fabry-Perot interferometer (muFPI) and cavity is fabricated by bonding glass and the soft-lithographically patterned PDMS. Several chemicals have been detected with the prototype devices. Measurements show that at least 10ppm chemicals can be detected even without any performance optimization of the devices.
Keywords :
Fabry-Perot interferometers; biosensors; chemical sensors; micromachining; optical sensors; polymers; polymer-based micromachined Fabry-Perot biosensor; polymer-based micromachined Fabry-Perot chemosensor; refractive-index sensitive optical sensor; white-light source; Biosensors; Bonding; Chemicals; Fabry-Perot interferometers; Glass; Optical refraction; Optical sensors; Optimization; Polymers; Prototypes; biosensor; chemosensor; polymer Fabry-Perot interferometer; white light source;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
Conference_Location :
Shenzhen
Print_ISBN :
978-1-4244-4629-2
Electronic_ISBN :
978-1-4244-4630-8
DOI :
10.1109/NEMS.2009.5068554
