A white-light source operated polymer-based micromachined Fabry-Perot chemo/biosensor

Author

Zhang, Tianhua ; Gong, Zhongcheng ; Que, Long

Author_Institution

Inst. for Micromanufacturing, Louisiana Tech Univ., Ruston, LA

fYear

2009

fDate

5-8 Jan. 2009

Firstpage

181

Lastpage

184

Abstract

A white-light source operated polymer-based micromachined Fabry-Perot chemo/biosensor is reported for the first time. It is a refractive-index sensitive optical sensor. The transducing signal varies upon the changes of the effective index of refraction in the sensing area, which is the Fabry-Perot cavity. This chemo/biosensor is made with PDMS and glass. Specifically, the micromachined Fabry-Perot interferometer (muFPI) and cavity is fabricated by bonding glass and the soft-lithographically patterned PDMS. Several chemicals have been detected with the prototype devices. Measurements show that at least 10ppm chemicals can be detected even without any performance optimization of the devices.

Keywords

Fabry-Perot interferometers; biosensors; chemical sensors; micromachining; optical sensors; polymers; polymer-based micromachined Fabry-Perot biosensor; polymer-based micromachined Fabry-Perot chemosensor; refractive-index sensitive optical sensor; white-light source; Biosensors; Bonding; Chemicals; Fabry-Perot interferometers; Glass; Optical refraction; Optical sensors; Optimization; Polymers; Prototypes; biosensor; chemosensor; polymer Fabry-Perot interferometer; white light source;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on

Conference_Location

Shenzhen

Print_ISBN

978-1-4244-4629-2

Electronic_ISBN

978-1-4244-4630-8

Type

conf

DOI

10.1109/NEMS.2009.5068554

Filename

5068554